Precision on Advanced IR Heating Technology

Precision IR sensor for wafer

Mon, 27 Jul 2026 09:45:13 +0800

Stop Wasting Heat on Your Wafers

When you’re processing wafers, every wasted watt is just money disappearing into thin air. Even worse? That wasted energy usually leads to uneven heating, which is a nightmare for your yield. That’s why we use gold-coated IR reflectors. The goal is simple: make sure the heat actually hits the wafer instead of leaking into the machine chassis.

Why Gold?

You might be used to standard aluminum reflectors, but those soak up a surprising amount of energy. We switch to a precision gold layer because gold is just better at bouncing infrared light. It’s not about making the machine look fancy. It’s about physics. Gold forces those IR photons to bounce back with almost zero loss, giving you a much tighter, more intense heat focal point.

High precision temperature heater

Mon, 01 Jun 2026 20:31:35 +0800

On the fab floor, a 0.5°C drift during the photoresist bake is all it takes to push critical dimensions out of spec and scrap an entire lot. You don’t need promises. You need a thermal platform that holds steady, shift after shift.

What matters under the hood

We built the heater around a short-wave infrared emitter and a quartz-stabilized thermal core. It gets to setpoint fast and keeps wafer-level uniformity within ±0.1°C. The package is Class 1–100 cleanroom-compatible and keeps particle generation at zero. The control loop holds setpoint repeatability under 0.05% even when you’re running 24/7. The payoff is a thermal budget you can count on for soft bake, hard bake, and post-exposure bake—no overshoot, no thermal lag.